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Course number and title: EEM250B MEMS Fabrication
Credits: 4
Instructor(s)-in-charge: R. Candler (
Course type: Lecture
Required or Elective: A Physical and Wave Electronics Area course.
Course Schedule:
Lecture: 3 hrs/week.
Dicussion: 1 hr/week.
Outside Study: 8 hrs/week.
Office Hours: 2 hrs/week.
Course Assessment:
Exams: 1 midterm and 1 final examination.
Design: 1 design.
Grading Policy: Typically, 30% midterm, 50% final, and 20% project.
Course Prerequisites: EECM250A
Catalog Description: Introduction to MEMS design. Design methods, design rules, sensing and actuation mechanisms, microsensors, and microactuators. Designing MEMS to be produced with both foundry and nonfoundry processes. Computer-aided design for MEMS. Design project required.  
Textbook and any related course material:
S. Senturia, Microsystem Design, Kluwer Academic Publishers, 2001.
Course Website
Topics covered in the course:
MUMPs process design rules.
SUMMiT process design rules.
Lumped element modeling.
Electrostatics and Devices.
Magnetostatics and Devices.
Piezoresistance and Devices; Piezoelectricity and Devices.
Accelerometer Design and Applications.
Optical MEMS Design and Applications.
RF MEMS Design and Applications.
Will this course involve computer assignments? NO Will this course have TA(s) when it is offered? NO

:: Last modified: September 2011 by C. Chiuco ::

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